Abstract
Three-dimensional analysis of the effects of atom beam divergence angle on the process of fabricating nanograting is discussed based on the three-dimensional motion model of Cr atoms in Gaussian standing wave laser field. From the simulative results it can be seen that Atomic beam spreading plays an important role in determining the deposition nanometer quality, so the preparation of a high-collimated and transversely cooled atomic beam, typically under 0.6mrad, is essential to minimize the severely disadvantageous effects for deposition of atoms in laser standing wave
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