Three-coordinate laser heterodyne interferometer for metrological assurance of scanning probe microscopes

Abstract

In this article we present the developed three-coordinate laser heterodyne interferometer that can be integrated in the commercially available industrial scanning probe and electron microscopes. It allows one to ensure traceability of measurements in nanometer range to the primary standard of meter. As outcome, the regular calibration of scanners becomes unnecessary, while the reproducibility and accuracy of the measurements dramatically increases.