Abstract
Three kinds of "films" i.e. cross-linked film, grainy film and transparent film, were obtained in the process of plasma polymerization of Octamethylcyclotetrasioxane (D4) under different conditions. From SEM photos, we can see that the cross-linked film has a network form. From XPS spectra, we can see that the content of Si-C bond of the cross-linked film is lower than that of the transparent film, and this result agrees well with the test results of FTIR spectra. This proves that the cleavage of the Si-C bond and C-H bond are the main cleavage in the formation of cross-linked film, whereas the cleavage of the Si-O is the main cleavage in the formation of transparent film. In order to enhance the collision of the reactive particles and investigate the influence of magnetic field on the plasma polymerization, we introduced the magnetic field, as a result, we got the grainy film.
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