Three-dimensional view of the shape, size, and atomic composition of ordered nanostructures by Rutherford backscattering spectrometry

Abstract

Conventional Rutherford backscattering spectrometry (RBS) in combination with Monte Carlo simulations performed on 3D model cells allow the self-consistent determination of the shape, size, and atomic composition of silica particles as model structures, on the submicron scale. Spherical and ellipsoidal particle shapes and the spatial distribution of implanted Ar and Xe in the particles and in the unmasked zones of the underlying substrate is investigated. We demonstrate that both lateral and depth information for ordered nano-objects can be derived from multiple RBS spectrum analysis.