Abstract
AbstractIt has been observed that, for some strained epitaxial layer systems, the surface of the layer develops roughness or waviness which correlates spatially with the positions of underlying interface misfit dislocations which partially relax the elastic mismatch strain. A model based on redistribution of mass by surface diffusion is analyzed to estimate the waviness of the three dimensional thermodynamic equilibrium surface due to intersecting arrays of interface misfit dislocations.
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