Abstract
Theoretical expressions for the longitudinal and transverse strain coefficients of resistivity in thin polycrystalline metallic films are derived by using a modified form of the three-dimensional conduction model. It has been found that the gauge factors mainly depend on the grain parameter v and that the thickness variations of these strain coefficients are determined by the grain boundary scattering process, in particular, either an increase or a decrease of gauge factors with thickness may be expected for defined values of v. Furthermore, a particular value of v exists for which the film thickness has practically no effect on the gauge factor. Comparison of previously published data on thin metal films shows that some experimental results can be interpreted on the basis of the present model.
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