Abstract
This paper contains results of the three-dimensional simulations of the surface topography evolution of the niobium superconducting radio frequency cavities during isotropic and anisotropic etching modes. The initial rough surface is determined from the experimental power spectral density. The simulation results based on the level set method reveal that the time dependence of the root mean square roughness obeys Family-Viscek scaling law. The growth exponential factors b are determined for both etching modes. Exponential factor for the isotropic etching is 100 times lower than that for the anisotropic etching mode reviling that the isotropic etching is very useful mechanism of the smoothing. [Projekat Ministarstva nauke Republike Srbije, br. O171037 i br. III45006
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