Three-Dimensional Si-Based Composite Nanorods Array Applied in Energy Storage System

Abstract

The rapid development of the integrated circuit (IC) and Micro/Nano-Electro Mechanical System (M/NEMS) technologies are promoting the continued emergence or commercialization of the miniaturized autonomous devices such as wireless sensor networks (WSN) in smart grid.[1-4] In order to operate independently, the micro/nano autonomous electronic devices must have onboard power supply. However, the battery miniaturization still can not keep pace with the size scaling-down of the CMOS electronic technologies, due to the poor electrochemical performance of the micro/nano batteries or the un-compatible battery fabrication process with the IC technologies. Currently, the transition from two dimensional (2D) to 3D rechargeable LIBs with better electrochemical properties in a small areal footprint was found to cope well with state-of-the art semiconductor technologies conceptually providing new opportunities for micro/nano power systems in the future. [5-7] In this work, the electrochemical performances of 3D Si-based composite nanorod (NR) arrays buffered by TiN/Ti interlayer, which were fabricated by a cost-effective, wafer scale and Si compatible process, were demonstrated and systematically investigated as the anode in rechargeable batteries. Lithium/Sodium ion storage behaviors were experimentally and theoretically studied.