Abstract
To meet the increasing needs of high-precision glass micro-optics and address the major limitations of current three-dimensional (3D) printing optics, we have developed a liquid, solvent-free, silica precursor and two-photon 3D printing process. The printed optical elements can be fully converted to transparent inorganic glass at temperatures as low as 600 C with a shrinkage rate of 17%. We have demonstrated the whole process, from material development, printing, and performance evaluation of the printed glass micro-optics. 3D printing of glass micro-optics with isotropic shrinkage, micrometer resolution, low peak-to-valley deviation ( < 100 n m ), and low surface roughness ( < 6 n m ) has been achieved. The reported technique will enable the rapid prototyping of complex glass micro-optics previously impossible using conventional glass optics fabrication processes.
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