Three-dimensional polymer structures fabricated by reversal ultraviolet-curing imprint lithography

Abstract

Polymer optical devices could be an alternative to dielectric or semiconductor devices, since they can be fabricated using low-cost processes with high manufacturing output. This article presents results on the fabrication of polymer optical device-like and three-dimensional structures using the imprint and reversal imprint techniques. This last technique offers the unique advantage of printing over nonflat surfaces allowing a layer-by-layer fabrication of three-dimensional structures. Depending on the size and density of the stamp features, a “whole layer transfer” mode or an “inking” mode can be observed. The same printable ultraviolet cross-linkable polymer (mr-L 6000 from Micro Resist Technology) has been used at each repetition of the fabrication process so that the number of layers that can be stacked onto a substrate is no longer limited by the polymer glass transition temperature (Tg), unlike previous results where different polymers with a decreasing Tg had to be used for the successive layers.