Abstract
The process of vertical alignment (VA) mode color filter liquid crystal on silicon (CF-LCoS) microdisplay was developed. In order to minimize the fringing field effect in small color pixels, a three dimensional (3D) optical model was established and performed to analyze this VA mode CF-LCoS microdisplay. The simulated result was compared with the experimental data and they coincided well. Optimization of this breed of VA mode CF-LCoS microdisplay was proposed with optimal pretilt angle and pixel size. With the pretilt angle of 86 degrees and the pixel size of 15 μm, the color purity of the VA mode CF-LCoS microdisplay could attain more than 60% National Television Standards Committee (NTSC) level, and the contrast was larger than 400.
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