Abstract
Abstract Software tools for modelling three-dimensional (3D) electrostatic and magnetic electron-optical systems have been used to investigate various aspects of the inspection of insulating specimens in a scanning electron microscope (SEM). The theory and implementation of the software are summarised. Three design studies relevant to SEM imaging are presented, each requiring a full 3D field and trajectory computation: (1) 3D microfields and trajectories near the surface of charged insulating specimens, (2) design of a front end of an asymmetric photomultiplier tube, (3) an off-axis electrostatic secondary electron collector in the presence of a magnetic lens field.
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