Abstract
Abstract For fabricating microstructures with extreme structural heights a technology has been developed which is based on deep-etch lithography and subsequent replication processes. A particularly high precision is achieved when the lithographic process is carried out by means of synchrotron radiation. Electroforming and molding processes are used for the replication of microstructures from a large variety of materials. The field of application comprises sensors, electrical and optical microconnectors, components for fluid technology, micromechanical components, microfiltration systems and novel composite materials.
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