Three-dimensional micro-force measurement method based on broadband optical coherence

Abstract

In response to the high-precision and multi-dimensional force measurement requirements in the fields of biology and medicine, this paper proposes a novel three-dimensional microforce measurement method based on the broadband optical coherence. A novel, compact, and low-coupling elastic element was designed, with a maximum outer diameter of 26 mm and a capacity of 50 g in the X-, Y-, and Z-directions, respectively. The functional relationship between the displacements of the three detecting points on the elastic element and the applied external force was derived based on the elastic mechanics theory. And it was also verified by the finite element method. A self-built optics system was set up to sense the displacements of the three points on the elastic element. The experiments results showed that the resolution in the X-, Y-, and Z-directions was 0.10 mN, 0.11 mN and 0.13 mN, respectively. In the measuring range of (10–50) g, the maximum coupling rate was 4.55 %, and the maximum linear error was 4.70 %. The maximum repeatability error was only 0.615 %. The method and sensor were verified with good characteristics of high resolution, low coupling rate, high linearity and high accuracy, comparing to other reported researches. The multi-dimensional force measuring method could be used in the fields of biology and medicine.