Three-dimensional metamaterials fabricated using Proton Beam Writing

Abstract

Proton Beam Writing (PBW) is a direct write lithographic technique that has recently been applied to the fabrication of three dimensional metamaterials. In this work, we show that the unique capabilities of PBW, namely the ability to fabricate arrays of high resolution, high aspect ratio microstructures in polymer or replicated into metal, is well suited to metamaterials research. We have also developed a novel method for selectively electroless plating silver directly onto polymer structures that were fabricated using PBW. This method opens up new avenues for utilizing PBW for making metamaterials and other sub-wavelength metallic structures. Several potential applications of three dimensional metamaterials fabricated using PBW are discussed, including sensing and negative refractive index materials.