Three-Dimensional Metallic Surface Micropatterning through Tailored Photolithography-Transfer-Plating.

Abstract

Precise micropatterning on three-dimensional (3D) surfaces is desired for a variety of applications, from microelectronics to metamaterials, which can be realized by transfer printing techniques. However, a nontrivial deficiency of this approach is that the transferred microstructures are adsorbed on the target surface with weak adhesion, limiting the applications to external force-free conditions. We propose a scalable "photolithography-transfer-plating" method to pattern stable and durable microstructures on 3D metallic surfaces with precise dimension and location control of the micropatterns. Surface patterning on metallic parts with different metals and isotropic and anisotropic curvatures is showcased. This method can also fabricate hierarchical structures with nanoscale vertical and microscale horizontal dimensions. The plated patterns are stable enough to mold soft materials, and the structure durability is validated by 24 h thermofluidic tests. We demonstrate micropatterned nickel electrodes for oxygen evolution reaction acceleration in hydrogen production, showing the potential of micropatterned 3D metallic surfaces for energy applications.