Abstract
A setup is described for an elastic scattering coincidence technique installed at an ion microprobe facility. This setup is developed for three-dimensional (3D) profiling of light elements in thin transmission targets. In the present paper, 3D imaging of carbon is demonstrated. Recoiled carbon atoms together with carbon ions scattered from the target are detected in coincidence using particle detectors placed symmetrically around the beam direction at 45°. Capabilities of the technique concerning depth resolution and sensitivity have been tested on thin samples of known composition. 3D imaging of carbon in 2 μm thick aluminum foil was achieved with a sensitivity for carbon of around 1 at. %, a depth resolution of 100 nm, and a lateral resolution of 2–3 μm.
Published Version
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