Abstract

Three-dimensional (3D) carbon interdigitated electrode arrays (IDEAs) were fabricated using inexpensive, conventional, UV photolithography of SU-8 with modified exposure and post exposure bake settings followed by pyrolysis in an inert environment. The sensor performance was investigated as a function of both the IDEA digit width/gap ratio and digit height under flow and no flow conditions. We demonstrated a gradual increase in redox amplification with an increase in the IDEA digit width/gap ratio. The highest amplification of 37 was obtained for a width/gap ratio of 1.58 and for an electrode height of 1.1 μm. Redox amplification also increases significantly with an increase in the IDEA height, from a factor of 9 at a 0.22 μm digit height to a factor of 37 at a 1.1 μm height. The effect of potential sweep rates on redox amplification was also investigated. As the sweep rate was decreased from 50 mV/s to 5 mV/s, the collection efficiency increased from 0.92 to 0.97, whereas the amplification increased from 7 to 25. Under flow conditions, the amplification decreases substantially as the cycling of the redox species is impeded by convection, resulting in a drop in collection efficiency. The highest amplification of 37 dropped to 4 for the same electrode at a flow rate of 500 nL/s. Under flow, redox amplification increased with an increase in the IDEA height.

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