Three-dimensional analysis of heat transfer and thermophoretic particle deposition in OVD process

Abstract

Heat transfer and particle deposition in the OVD process are simply modeled as a buoyant jet flow impinging on a circular target cylinder and numerically analyzed using a finite volume method on the flow, heat transfer and thermophoretic particle deposition over the cylinder. Effects of the three-dimensionality, conjugate heat transfer and longitudinal traversing of the jet on the particle deposition are investigated. The surface temperature, which is the most important value in the whole OVD process, is estimated considering the conjugate heat transfer. As the conductivity of the cylinder decreases, Nusselt number, particle deposition rate and deposition efficiency greatly decrease due to the reduced temperature gradient. Since the increase of the jet traversing speed keeps the surface temperature relatively low, Nusselt number and the particle deposition increase with the traversing speed.