Abstract
A small three-degree-of-freedom ultrasonic motor has been developed using a simple piezoelectric lead zirconate titanate (PZT)-tube stator (OD 5 mm, ID 3 mm, length 15 mm). The stator drives a ball-rotor into rotational motion around one of three orthogonal (x-, y-, and z-) axes by combing the first longitudinal and second bending vibration modes. A motor prototype was fabricated and characterized; its performance was superior to those of previous motors made with a PZT ceramic/metal composite stator of comparable size. The method for further improving the performance was discussed. The motor can be further miniaturized and it has potential to be applied to medical microrobots, endoscopes or micro laparoscopic devices, and cell manipulation devices.
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