Abstract
A proposed model of an effective medium in which a Maxwell–Garnett matrix medium is filled with a Bruggeman medium is used to solve inverse problems of multi-angle ellipsometry to determine the composition of transition layers surrounding a layer of thermal silicon dioxide on a silicon substrate. The volume filling factors of the layer reflect correctly possible structural transformations during the oxidation of crystalline silicon.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.