Abstract
RF MEMS phase shifter is a device that is used to modify the transmission phase of RF signal and provide signal control. Phase shifters are high-value components used in phased array antenna architectures. In phased array antenna the phase shifter is used to provide reliable electronic beam steering. The proposed 3-bit distributed MEMS transmission line (DMTL) phase shifter is designed using elevated coplanar waveguide (ECPW) transmission line for the first time, which results in better return loss of [Formula: see text]14.23[Formula: see text]dB and an average insertion loss of [Formula: see text]1.46[Formula: see text]dB. This paper discusses the development of ECPW-based 3-bit DMTL phase shifter designed to operate at 15[Formula: see text]GHz.
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