Abstract

This is a report of a study of the nonlinear optical properties of samples based on multiple Al2O3/ZnO bilayers fabricated by atomic layer deposition (ALD) in silica. The multi-layer configuration for samples consists of alternated layers of constant thickness of Al2O3 (Δx) and ZnO (Δy) nanolaminates with a total thickness of ∼ 500 nm. The physical properties of the samples were characterized by means of TEM, spectrophotometry and variable angle spectroscopic ellipsometry. The absorptive and refractive contributions to the nonlinearity of the samples were studied by means of z-scan technique using a 100 fs at 800 nm. The nonlinear parameters, β and n2, are studied using different values of the layers thickness, Δx and Δy, in the nanolaminated stack. The possible applications in optical signal processing system are discussed by means of the figures of merit W and T.

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