Abstract
Three-dimensional ion trajectories in Wien filters were calculated in a third-order approximation. The results were expressed as a total transfer matrix with aberration coefficients. Two-dimensional image shapes at an image plane were simulated by using these results. Focusing properties of the systems with a homogeneous Wien filter and a stigmatic Wien filter were investigated as examples. Third-order aberration coefficients of the system were calculated and two-dimensional image shapes were pictorially estimated. The method for evaluating the ion optical properties of Wien filter systems was developed.
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