Third-Order Intrinsic Aberration Modification with Second-Order Accuracy Transfer of Pupil Coordinates and Extrinsic Aberration of Plane-Symmetric Optical System with a Two-Dimensional Field Light Source

Abstract

A plane-symmetric optical system with a two-dimensional field light source, such as a soft X-ray and vacuum ultraviolet optical system, is widely used for synchrotron radiation source devices, microscopes and so on. Therefore, this paper studied third-order intrinsic aberration modification with second-order accuracy transfer of pupil coordinates and extrinsic aberration of these kinds of optical systems. First, we discuss the extrinsic aberration calculation method and derive the corresponding aberration expressions; in addition, we apply optical geometric relations and the polynomial fitting method to obtain a second-order accuracy transfer relationship expression of the pupil coordinates between adjacent optical surfaces and derived the modification calculation expressions of the intrinsic aberration caused by the above factor. Finally, the third-order intrinsic aberration modification with second-order accuracy transfer of pupil coordinates and extrinsic aberration expressions derived in this paper are applied to calculate ray spot diagrams of two soft X-ray and vacuum ultraviolet optical systems with meridional and sagittal field angle light sources, and these results are compared with those obtained from the ray-tracing software Shadow; this showed that the calculation accuracy of the aberration expressions is sufficient.