Abstract

We numerically employ the differential algebraic technique to calculate the third and fifth-order geometric aberrations coefficients, which are derived by using the map method, of the magnetic exponential lens model. These coefficients are calculated for object magnetic immersion (OMI). The magnetic exponential model is used as an example for the magnetic round lens to calculate the coefficients. The numerical electron optical results are perfectly in match with the analytically results with a very small relative error (10-10- 10-12). The DA advantage technique is a very compendious, effective, proper, and accurate for analysis of electron optical aberration. The COSYINFINITY 10 code is used in our calculations.

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