Thin-film transistor array technology for high-performance direct-conversion x-ray sensors

Abstract

Thin Film Transistor (TFT) array technology is presented for Digital X-ray Sensors in Direct Radiography applications. Circuit simulations were performed to optimize the design of the TFT array. The sensor array uses a combination of a mushroom electrode with a high fill factor of 86% and a polymer passivation dielectric to minimize column capacitance and improve signal-to-noise ratio. A 14 in. X 8.5 in. sensor array with 1536 X 2560 pixels was developed using this technology. The TFT arrays are processed entirely in Class 1 clean room environments to eliminate line defects and minimize pixel defects. The best 14 in. X 8.5 in. panels have exhibited fewer than 0.001% pixel defects, as detected during in process testing prior to Se coating. In typical image quality comparisons with conventional X-ray film/screen combinations, the digital X-ray sensor exhibited equal or better performance than film-screens. Clinical studies were also conducted. Radiologists concluded that diagnostically significant projection radiographic images can be produced with the new digital X-ray sensor that are equivalent or superior to conventional film/screen images at the same X-ray exposures. The detector recently received FDA approval.