Thin-Film Simulation Model for Comparing Production Schedules in a Semiconductor Fabrication Facility

Abstract

Analysis of advanced manufacturing systems in any manufacturing industry requires certain level of knowledge about the system. Flexible manufacturing cells, in particular, are commonly used in most wafer fabrication to provide the ability to change product without requiring the construction of new manufacturing plant. This level of flexibility comes at a significant capital cost and, in order to achieve the maximum potential of each cell, it is essential to characterize and establish the performance of these cells in detail before a new production plan is implemented. Using state-of-the-art computer simulation and a structured modelling methodology a generic model of flexible manufacturing cells has been developed and used to examine the impact of changing product volumes (ramps), product priority, and maintenance schedules on the toolset performance. The model has been developed and validated using actual production data and found to effectively duplicate the behaviour of the manufacturing installation. Various criteria, e.g. tool utilization & product cycle time, are used to evaluate the response of the cell to the demands made on it by different manufacturing plans. In this way, a plan that maximizes system performance and reduces risk may be achieved.