Abstract
In this paper, the characteristics of a thin-type ultrasonic motor generating elliptical displacements analyzed by FEM are presented, and then fabrication of the motor is then described. The structure of the motor consists of sixteen ceramic pieces attached to the upper and bottom surfaces of an elastic body. The principle of the motor is to apply alternating voltages which have a 90 phase difference to the attached ceramics, and then elliptical displacements are generated at four edges of the elastic body. Then the rotor is moved by the elliptical displacements. In the case of a ceramic thickness of 1.5, the highest speed was obtained at 79 kHz. In the case of a ceramic thickness of 2 mm, the highest speed was obtained at 77.5 kHz. Consequently, the speed and torque of the ultrasonic motor (USM) increased linearly with increasing applied voltage.
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