Thin Specimens for TEM and AEM

Abstract

The purpose of this laboratory is to prepare samples of metals, ceramics, and geological and microelectronic specimens for examination and analysis in the transmission electron microscope (TEM) and analytical electron microscope (AEM). Material forms include bulk, thin films, and particles. To achieve suitable electron transparency, and meet various requirements for electron diffraction and microanalysis, the thin region of the specimen must be <100 nm thick (or <20 nm thick in the case of EELS). The specimen may be self-supporting with thin areas around a hole in the center or it may be thin fragments or particles supported on a carbon-coated grid. Note that, in general, thin specimen preparation is a difficult art and that volumes have been written on the subject. This guide should only be used as a starting point. A serious user of the AEM must refer to the references given.