Abstract
Thin films of molybdenum oxides as well as silver molybdates have been deposited by means of double-source pulsed reactive magnetron sputtering. Chemical and phase composition of deposits has been studied by X-ray diffractometry, energy dispersive spectrometry (EDS) and Raman microscopy. Dependent on silver content, three phases, i.e. Ag 2 Mo 4 O 13, Ag 2 Mo 2 O 7 and Ag 2 MoO 4, belonging to MoO 3–Ag 2 O binary system, have been identified in the deposited films. It has been shown that silver molybdate films can be easily obtained by subsequent sputter deposition of silver and molybdenum oxide layers at the temperature of 450 ° C. Single phase Ag 2 MoO 4 thin films behave very well during dry sliding against alumina ball in the wide temperature range (100–600 ° C), showing friction coefficient below 0.4.
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