Thin films of mechanically hardened FeMoBCrNi alloys deposited by the facing targets sputtering method

Abstract

Thin films of ultra-hard iron, molybdenum and boride-based alloys with excellent wear and corrosion resistance were prepared on the plasma-free substrates by the facing targets sputtering method, with the purpose of applying them to protective layers in magnetic recording media. Although the deposited films had almost the same composition as the targets, the films became amorphous and flexible through rapid quenching, while the targets were polycrystalline and brittle. The amorphous films with a densely packed microstructure did not crystallize even by heating at 400°C for 1 h. The texture of the film surface was modified by applying an r.f. bias voltage to the substrates. The tribology on the film surface with magnetic head was then very much improved. Therefore it was confirmed that these films may be suitable for use as protective layers in magnetic recording media.