Abstract
The composition and structure of thin films obtained by vacuum co-deposition of Co and TeO 2 in an atomic ratio R Co/Te=1.5 are studied. It is shown that during the co-deposition a chemical reaction between both substances takes place resulting in the formation of amorphous CoO phase and elemental Te, very finely dispersed in the amorphous matrix. The reaction in as-deposited films proceeds until the complete oxidation of Co to Co 2+. It is found that the crystalline phases of CoO, Co 3O 4 and/or Te are formed upon thermal heating of the films above 300°C. In this case, the reaction proceeds until complete consumption of TeO 2 via the oxidation of Co 2+ to higher valence and the formation of mixed oxides.
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