Abstract

AbstractFrom having the hardness of diamond to carrying currents several hundred times that of copper, thin films make a difference in today's high‐tech systems and solutions. Pulsed laser deposition as a layer by layer growth technology excels in growing the most complex oxides and even produces epitaxial films with high crystal orientation. Powered by UV excimer lasers, it has long reached 24/7 production maturity and is successfully applied to industrial thin film manufacturing on large substrate wafers, panels and tapes.

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