Abstract
Near-field electrospray was used to deposit zinc acetate precursor particles over comb electrodes. These particles were heated and oxidized to form a zinc oxide (ZnO) semiconductor at 500 °C. The resulting ZnO thin film on the comb electrode was incorporated into a gas sensor, which was examined using a custom built measurement system. The current that was measured through the electrodes was used to calculate the resistance of the ZnO between the fingers of the comb electrode. The resistance decreased as the sensor was exposed to the target gas of ethanol, while the sensing response (R0/Rg) increased at higher concentrations of target gas. The ZnO sensor displayed high sensitivity because of the small diameters and high specific surface area of the electrospray particles. The ZnO sensors show great promise for use as micro/nano gas sensors as they exhibit high sensitivity, repeatability and stability.
Highlights
Inkjet printing has attracted attention for the fabrication of micro/nano functional structures as it is a low-cost technology that is easy to process and shows good material compatibility.[1,2,3] inkjet printing is a non-contact technology that does not require etching and exposure processing,[4] which allows complex functional patterns to be printed precisely on flat and three dimensional substrates with the help of moving platforms
GAS SENSING RESULTS Changes observed in the resistance of a zinc oxide (ZnO) thin film when exposed to a target gas are proportional to its concentration
This change in resistance is determined by measuring the current through the ZnO thin film in the presence of a target gas
Summary
Inkjet printing has attracted attention for the fabrication of micro/nano functional structures as it is a low-cost technology that is easy to process and shows good material compatibility.[1,2,3] inkjet printing is a non-contact technology that does not require etching and exposure processing,[4] which allows complex functional patterns to be printed precisely on flat and three dimensional substrates with the help of moving platforms. Thin film zinc oxide gas sensor fabricated using near-field electrospray We report the use of near-field electrospray to direct-write micro/nano particles onto comb electrodes for the fabrication of highly sensitive gas sensors.
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