Abstract
Yttria-stabilized zirconia thin films deposited by radio-frequency sputtering from a 3 mol% Y 2O 3 ZrO 2 target show primarily tetragonal orientation. Annealing in air further reduces the fraction of monoclinic phase and enhances the crystallinity of the tetragonal phase. Films annealed at 700 °C for 2 h showed a phase composition which was greater than 95% tetragonal.
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