Abstract
Abstract. Especially in the case of measuring small forces, the use of conventional foil strain gauges is limited. The measurement uncertainty rises by force shunts and is due to the polymer foils used, as they are susceptible to moisture. Strain gauges in thin film technology present a potential solution to overcome these effects because of their direct and atomic contact with the measuring body, omitting an adhesive layer and the polymer foil. For force measurements up to 1 N, a suitable deformation element was developed by finite element (FE) analysis. This element is designed for an approximate strain of 1000 μm m−1 at the designated nominal load. The thin film system was applied by magnetron sputtering. The strain gauge structure is fabricated by distinct photolithographic steps. The developed sensors were tested with different load increments. The functional capability of the single resistance strain gauges could be proven. Moreover, a developed sensor in a full bridge circuit showed a linear characteristic with low deviation and good stability.
Highlights
For many years, the use of resistance strain gauges (RSGs) for deformation measurements of parts has been state of the art
This paper presents the design of a compact deformation element for a nominal load of 1 N suited for the application of thin film strain gauges
The present paper shows the development of a force transducer for small forces up to 1 N in the metrological field
Summary
The use of resistance strain gauges (RSGs) for deformation measurements of parts has been state of the art. Most common are foil strain gauges, where the strainsensitive pattern is applied to a flexible polymer foil or comparable backing material. These gauges are fixed to the designated areas of deformation with a special glue. The thickness of the backing material has to be mentioned, as this creates a distance between the actual deformation of the part and the strain-sensitive pattern. Both the foils and the glue have a limited durability at high or very low temperatures. The developed prototype is connected in a full bridge circuit and demonstrates good stability and a linear behavior during strain measurement
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