Abstract

This chapter is a review of ID, 2D and 3D thin film position sensitive detectors (TFPSD) made with hydrogenated amorphous silicon. Examples of different types of TFPSD are given, including the technological implications of the fabrication process and the physics ruling their behaviors. A detailed numerical analysis and electro-optical characterization is made for large area thin film position sensitive detectors and linear array devices, including the peripherals to be used in measurement/inspection systems.KeywordsReverse BiasPlasma Enhance Chemical Vapor DepositionLight SpotResistive LayerEquivalent Electric CircuitThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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