Abstract

The main objective of this research program was to develop a new method of depositing thin polycrystalline silicon films, utilizing an energy beam, for producing solar cells capable of meeting the long range economic and performance objectives of DOE's National Photovoltaics program. The main task was divided into the following four sub-tasks: (1) investigation of the energy beam as a means for efficient, high-rate deposition of polysilicon films; (2) development of temporary, reusable substrates for polysilicon deposition; (3) subsequent grain enhancement of self-supporting thin silicon films through laser recrystallization; and (4) demonstration of at least 10% efficient solar cells fabricated on these grain enhanced silicon films. Progress is reported in detail. (WHK)

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