Abstract
The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices has the potential to service many applications, spanning non-linear optics to quantum photonics with embedded diamond colour centres. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1 μm thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.
Highlights
Diamond is attractive as a material for use in high-performance onchip photonic devices
In this work we present a hybrid integration technique based on the bonding of a flexible diamond platelet to pre-fabricated integrated photonic devices on a different material
We propose the fabrication of thin single-crystal diamond membranes using dry etching, that can be transferred onto established photonic circuitry using liquid mediated capillary bonding
Summary
Diamond is attractive as a material for use in high-performance onchip photonic devices. GaP presents a high refractive index, mechanically durable material, with low optical absorption (2.3 eV bandgap [12]) that satisfies waveguiding criteria for some of the defect centres in diamond Another recent approach is to use diamond resonators fabricated on a SiO2 substrate with SU8 spotsize converters extending the diamond guides for end-fire injection via lensed fibre [2,4,13,14,15]. Silicon was chosen as a platform for diamond integration as it provides low-loss, highly confining waveguide devices that are well understood and could be used for non-linear applications This technique can be used with any planar waveguide technology, such as GaN which has a refractive index more closely matching that of diamond at wavelengths for NV− colour-centre emissions. Nothing other than the capillary forces detailed were used in adhering the diamond to the silicon device
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