Thin film characterization using a mechanical properties microprobe

Abstract

A new ultra-low load microindentation system has been acquired in the Metals and Ceramics Division of Oak Ridge National Laboratory. The system's spatial resolution and its data acquisition capabilities allow the determination of several mechanical properties from volumes of material with submicron dimension—hence the term mechanical properties microprobe (MPM). Research with the MPM at Oak Ridge has led to improved techniques for determining the plastic and elastic properties of materials using microindentation experiments. The techniques have been applied to thin films created by ion implanting metals and ceramics, radiation damaged materials and thin hard coatings of TiN. Changes in the strength (hardness) and modulus have been measured in films as thin as 200 nm.