Abstract
B 4C optical coating represents, together with Ir, Pt, SiC, one of best choice for high reflectance in the extreme ultraviolet region. This material is also used combined with others materials in multilayer such as Si/B 4C or as interlayer in Mo/Si multilayer to avoid interdiffusion. In this study we have performed optical, compositional and structural analyses for thin film of B 4C deposited by means of magnetron sputtering and on preliminary samples deposited by e-beam evaporation. Here we report reflectivity measurements and the derived optical constants of B 4C in the 400–1500 Å region.
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