Abstract
Thin epitaxial CeO 2 films were prepared on (001) MgO and (11̄02) Al 2O 3 single crystal substrates by the aerosol MOCVD method. X-ray diffraction analysis using a four-circle texture goniometer revealed small amount of in-plane misoriented CeO 2 crystallites for the MgO substrate and high epitaxial degree of CeO 2 films deposited on (11̄02) A1 2O 3.
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