Abstract
This paper aims to reveal the effect of magnetic liquid on the resonant frequency shift and the output impedance. For this purpose, a thin film sensor was designed with a finite-thickness layer of magnetic fluid, and the thickness shear vibration of the film was analysed in details. The main findings are as follows. First, the relative resonance frequency is positively correlated with the intensity of magnetic field, and the viscosity coefficient, density and volume fraction of magnetic fluid. The effect of magnetic field on the shift of the relative resonant frequency depends on various parameters of magnetic liquid. With the increase of the volume fraction, density and viscosity coefficient, the resonant frequency plunges, but the output impedance peak grows in size. Therefore, the relative resonant frequency shift and the output impedance are sensitive to various parameters in the design. The research findings shed new light on the application of thin piezoelectric film in sensors.
Highlights
The last couple of decades has seen the successful deposition of an ultra-thin piezoelectric film of Aluminium-Nitride (AlN) or Zinc oxide (ZnO) on a silicon layer, laying the basis for thin-film bulk acoustic resonator (FBAR) working in the GHz frequency range [1,2,3]
This paper analyses the thickness shear vibration of ZnO film covered with a finite-thickness layer of magnetic liquid
The analysis reveals that relative resonant frequency and the output impedance are sensitive to various design parameters
Summary
The last couple of decades has seen the successful deposition of an ultra-thin piezoelectric film of Aluminium-Nitride (AlN) or Zinc oxide (ZnO) on a silicon layer, laying the basis for thin-film bulk acoustic resonator (FBAR) working in the GHz frequency range [1,2,3]. Thickness shear mode sensors have been developed to detect compounds coated with surface bound receptive layers in gases or liquids. THICKNESS SHEAR VIBRATION OF A ZNO FILM STRUCTURE COVERED WITH MAGNETIC FLUID. Under the action of magnetic field, the magnetorheological properties change, and act on the piezoelectric thin film by sound wave. Based on piezoelectric elastic theory, viscoelastic mechanics and liquid mechanics, the author analysed the thickness shear vibration of ZnO thin film covered with a finite-thickness layer of magnetic liquid. The author investigated the propagation properties of bulk acoustic waves in the multilayer piezoelectric thin film with a tilted c-axis, seeking to derive the analytical method for bulk acoustic waves and aiming to disclose the effect of magnetic liquid on the shift of resonant frequency
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