Abstract
Diamond-like carbon (DLC) has been used as thin films to protect the surface of magnetic disks in hard disk drives. Recently, in order to improve the recording density of the hard disks, DLC films need to be thinner than 10 nm in thickness. Therefore, it is necessary to develop the accurate thickness measurement technique for thin DLC films. in this study, to establish the thickness measurement technique for DLC films using electron energy-loss spectroscopy (EELS) and electron holography, we estimate the mean free path for inelastic scattering (ƛp) and the mean inner potential (U0). Through the evaluation of ƛp and U0, we compare the accuracy of EELS and electron holography on thickness measurement of DLC films.The DLC films in this study are deposited on silicon wafers by chemical vapor deposition (CVD), sputtering and ion beam deposition (IBD) methods.
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