Abstract
Wavelength-scanning interferometry can measure thickness of transparent plates by differentiating optical path differences from multiple surface interference in the Fourier domain. However, nonlinear laser tuning deviates the measurement result from the nominal value. We propose a wavelength stepping measurement scheme combined with a phase unwrapping technique for two-dimensional transparent plate thickness measurements. Wavelength stepping allows practical high-resolution and large optics measurements. Systematic errors caused by nonlinearities in laser source stepping are reduced with synthetic wavelengths measured by a reference array using the phase unwrapping technique. Sub-micron measurement accuracy is achieved using the proposed method for a step height standard etched on a 3 mm quartz block.
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