Thickness Effects on the Plasticity of Gold Films

Abstract

An indentation size effect is a common occurrence during nanoindentation. Thin and thick gold films, deposited using sputter deposition and evaporation, illustrate this at depths less than 100 nm. The indentation size effect, however, has been observed to be independent of film thickness. It has been modeled using a combination of an indentation size effect model and a parabolic hardening model. At the near surface regime, the indentation size effect model is dominant, and at larger depths, the parabolic hardening model is dominant, taking into effect the film thickness. The described model, which is a combination of these two, fits the experimental data for the sputter-deposited films and the evaporated films.