Abstract
A multilayer Ba0.7Sr0.3TiO3∕Cr∕Ba0.7Sr0.3TiO3 (BST/Cr/BST) structure was sputtered sequentially onto Pt∕Ti∕SiO2∕Si substrate. With the insertion of a 2nm Cr interlayer, the temperature coefficient of capacitance of the BST/Cr/BST dielectric is about 69% lower than that of BST monolayer dielectric. The dielectric constant and dissipation factor as the function of Cr thickness are studied. X-ray diffraction patterns, the analysis results of energy dispersive spectroscopy, and the survey scan profiles of Auger electron spectroscopy reveal the formation of a TiO2 secondary phase after the multilayer is annealed at 800°C in O2 atmosphere. The insertion of nano-Cr interlayer improves the electrical properties of BST capacitors.
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