Abstract
The magnetic properties of the films depend on the film thickness. To investigate the thickness effect, the films are prepared by a reactive rf magnetron sputtering method with different thicknesses (0.05–4.5 μm). The angular dependency of resonance magnetic field and linewidth is observed by FMR technique at 9.84 GHz. As a result, there exist two different resonance modes in films below 1 μm thickness. On the basis of the FMR, XRD and TEM, an amorphous phase forms during initial growth stage and it gradually changes to crystalline structure as the film thickness increases.
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