Abstract
The thickness dependence of soft magnetic properties was investigated for Fe-Si and Fe-Si-N films. The results were compared with the predictions of Hoffmann's ripple theory. It was suggested that the optimum soft magnetic properties can be obtained for films with thickness around 2000 Å. Reducing the grain size as well as suppressing the column growth in the films lead to a way to improve the magnetic softness of Fe-based films, and the nitrogenation of the films is an effective method to realize this purpose.
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